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ADT Model 7100 Semi-Automatic Dicing System Operations Manual
Workpiece Alignment
P/N 97100-9002-000-14 Ver 06/05
6.1-17
directional search if needed. If the system still fails to find the second
model, the fine (main) alignment procedure is repeated again on the lower
1
/
3
of the wafer.
If finding the second model still fails, the whole fine (main) alignment
procedure fails and the user assistance is required.
For the second main model the procedure is similar.
The directional search areas are limited by the align area of the wafer. The
search is never performed outside the Align Area (parameter defined in
the Align category).
As in low alignment, this limitation may cause any of the directional spiral
searches not to take place.
Figure 6-15 below represents the Street Alignment algorithm as a whole.
6.1.3.3.3 Alignment High/Low Score Parameters
The algorithm also uses the concept of sub-model. The sub-model is used
for Main model verification purposes. For example, if the model is not
Figure 6-15: Alignment Algorithm
Yes
Find the First Low
Model (L
1
)
L
1
Found
Look in the Upper 1/3
of the Wafer
L
1
Found
Look in the Loewr 2/3
of the Wafer
No
YesNo
Find the Second
Low Model (L
2
)
L
1
Found
Yes
Manual
Assist
No
L
2
Found
Manual
Assist
No
Yes
Find the Third Low
Model (L
3
)
L
3
Found
Look for M
1
Look for M
1
M
1
Found
Look for M
2
M
2
Found
No
No
No
Yes
Yes
Yes
Manual
Assist
Manual
Assist
Manual
Assist
Note: The algorithm allows the user to find the models manually (Manual
Assist) or perform Manual Alignment instead.
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